Micro Flow Sensor for Ultra Low Gas Flow

Available from Innovative Sensor Technology, USA Division

IST’s thin film MFS02 thermal mass micro flow sensor is ideal for small gas flow and differential pressure applications. The sensor features an ultra sensitive polymer membrane on a special glass substrate with four heaters and a pt1000 temperature sensor. The MFS02 is capable of measuring from 0.001 to 2m/s (50 m/s) in a temperature range of -40 to +60°C. Custom sensor dimensions and layouts can be selected to fit specific customer applications. The sensor’s rugged design lends itself for mounting on an electronic PCB or other carrier. EVA kits are available for evaluation of the MFS02.

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