ESC Series Electrostatic Chuck Power Supplies
Available from Comdel Inc.
Comdel's ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight supplies come complete with NRTL product safety marks, built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.
The ESC series voltage sources provide stable power for electrostatic chucks used in semiconductor wafer transfer.
Features include reduced risk of permanent charge on chuck through output polarity reversal, low stored energy and built-in current limitations to safeguard from surges and arcs, short circuit and open circuit proof design for enhanced reliability, ETL Marked for product safety and CE compliant, and built-in RF filtering.