CB Series RF Power Supplies
Available from Comdel Inc.
RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 2 to 60 MHz. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CB series is based on Comdel's proven RF amplifier technology.
The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photolvoltaic applications.